Tel.: 8615989623158
E-mail: sales@grandetop.com
Tel.: 8615989623158
E-mail: sales@grandetop.com
XUV eXtreme High Vacuum Chambers achieve pressures below 10-12 Pa (10-14 mbar), enabling atomic-scale cleanliness for quantum technologies, particle physics, and fundamental research. Below are their technical specifications, applications, and operational principles:
Core Definition & Technical Thresholds
| Parameter | XHV Standard | Comparison to UHV |
| Pressure Range | <10-12 Pa (10-14–10-15 Pa) | UHV: 10-7–10-12 Pa |
| Gas Density | <26 molecules/cm3 | UHV: ~104 molecules/cm3 |
| Outgassing Rate | <10-13 mbar·L·s-1·cm-2 | UHV: <10-11 mbar·L·s-1·cm-2 |
| Leak Rate | <10-13 mbar·L·s-1 | UHV: <10-9 mbar·L·s-1 |
Critical Components & Technologies
Pumping Systems:Cryopumps: Capture gas molecules on 4K surfaces (liquid helium-cooled).
Non-Evaporable Getters (NEGs): Zr-V-Fe alloys chemically adsorb H2, CO, CO2 at 400–600°C.
Ion Sputter Pumps: Remove noble gases (He, Ne) via titanium sublimation.
Chamber Materials:
316L Stainless Steel: Low-carbon, electropolished (Ra <0.1 μm).
Copper Seals: Oxygen-free copper gaskets for ConFlat flanges.
Baking & Activation:
Bake at 250–400°C for 48–168 hours to desorb H2O.
NEG activation at 450°C under vacuum.
Key Applications
| Field | Use Case | Impact |
| Quantum Computing | Qubit fabrication (Si/SiGe, superconducting circuits) | Reduces decoherence; enables T2 >2 ms |
| Particle Physics | LHC beamlines, dark matter detectors (e.g., LUX-ZEPLIN) | Minimizes beam-gas interactions |
| Gravitational Waves | LIGO/Virgo interferometer optics | Lowers phase noise from residual gas scattering |
| 2D Material Science | Growth of defect-free graphene/MoS2 | Ensures carrier mobility >105 cm2/V·s |
| Nuclear Fusion | ITER plasma confinement chambers | Prevents fuel dilution |
Operational Challenges & Solutions
| Challenge | Solution | Technical Approach |
| Hydrogen Permeation | Double-wall chambers with LN2 shield | Traps H2 diffusing from stainless steel |
| Helium Accumulation | Titanium sublimation pumps (TSPs) | Chemisorption of inert gases |
| Micro-vibrations | Magnetic levitation pumps | Eliminates mechanical vibration transfer |
| Carbon Monoxide (CO) | NEG coatings on chamber walls | Sticking probability >0.3 for CO at 25°C |
Achieving XHV: Step-by-Step Protocol
Initial Pumpdown:
Turbo-molecular pump to 10-7 Pa.
Baking Phase:
Heat to 300°C ±5°C for 72 hours under high vacuum.
NEG Activation:
Heat NEG panels to 450°C for 2 hours.
Cryopump Engagement:
Cool cryopanels to 4K; monitor pressure via Bayard-Alpert gauge.
Validation:
Use Residual Gas Analyzer (RGA) to verify H2 partial pressure <10-13 Pa.
Performance Metrics
| Metric | XHV Standard | Cutting-Edge Systems |
| Base Pressure | <10-12 Pa | <5×10-13 Pa (CERN XHV lab) |
| Outgassing Rate | <10-13 mbar·L·s-1·cm-2 | 2×10-14 mbar·L·s-1·cm-2 (post-bake 316L) |
| Temperature Stability | ±0.1°C | PID-controlled multi-zone heaters |
Real-World Implementations
LIGO Optics Chambers:
XHV (10-14 Pa) reduces gas-phase noise, enabling detection of gravitational waves from 1.3 billion light-years away.
IBM Quantum Heron Processors:
XHV chambers with NEG coatings extend qubit coherence by 10× vs. UHV environments.
ITER Vacuum Vessel:
Double-wall cryopanel design maintains <10-11 Pa during plasma operation.
Future Directions
Room-Temperature XHV:
Photonic crystal surfaces to trap molecules via van der Waals forces (experimental).
AI-Optimized Baking:
Machine learning predicts outgassing decay curves to shorten bake times by 30%.
Conclusion:
XHV chambers represent the pinnacle of vacuum technology—enabling zero-tolerance environments where single-molecule contamination can disrupt quantum states or particle beams. Their deployment is critical for next-gen quantum computers, fusion reactors, and cosmic observatories.
Cryo-pumped XHV systems
Ion pumps for XHV
NEG-coated chambers
All-metal XHV gate valves.
