Tel.: 8615989623158
E-mail: sales@grandetop.com
Tel.: 8615989623158
E-mail: sales@grandetop.com
UHV Baking & Degassing Chambers are critical for achieving ultra-high vacuum (UHV) conditions by removing adsorbed gases, water vapor, and contaminants from chamber walls and components. Below is a technical breakdown of their applications, parameters, usage, and operational principles
Core Description
Purpose: Eliminate surface-bound contaminants (H2O, CO, H2, hydrocarbons) via controlled heating under vacuum, enabling base pressures <10-10 mbar.
Mechanism:
Baking: Heats entire chamber to 150–400°C to desorb gases trapped in materials.
Degassing: Targets specific components (e.g., ion pumps, NEG panels) with localized heating.
Key Components:
Heating System: Resistive heaters (flexible blankets/embedded coils) with ±1°C uniformity.
Thermal Insulation: Multi-layer reflectors (MLI) minimizing heat loss.
Vacuum Monitoring: Bayard-Alpert gauges and RGAs tracking partial pressures.
Key Applications
| Industry | Use Case | Impact |
| Particle Physics | Pre-conditioning LHC beam pipes (<10-13 mbar) | Prevents beam scattering from residual gas |
| Semiconductor | Degassing EUV lithography chambers (prevents carbon haze on optics) | Enables <2 nm chip fabrication |
| Quantum Computing | Preparing qubit fabrication chambers (reduces decoherence) | Extends coherence time >100 μs |
| Aerospace | Outgassing satellite components per ASTM E595 | Avoids sensor contamination in orbit |
| Fusion Research | Conditioning ITER vacuum vessel walls | Maintains plasma purity |
Critical Parameters
| Parameter | Typical Range | Significance |
| Temperature | 150–400°C (baking); 600°C (NEG degas) | Higher temps remove deeply trapped H2O (≥200°C required) |
| Vacuum Level | <10-7 mbar during baking | Ensures efficient gas desorption |
| Ramp Rate | 1–5°C/min | Prevents thermal stress in welds/ceramics |
| Bake Duration | 24–168 hours | Time-dependent outgassing decay (e.g., H2O peaks at 8h) |
| Cooling Rate | <2°C/min (post-bake) | Avoids re-adsorption of gases |
| Leak Rate | <10-9 mbar·L/s | Validates integrity post-bake |
Operational Workflow
1.Pre-Bake Preparation:
Clean surfaces with solvents (acetone/IPA) and install thermocouples/RGA probes.
2.Pump-Down & Initial Heating:
Rough pump to 10-3 mbar, then engage turbopumps.Heat at 1–5°C/min to 150°C (hold for outgassing).
3.High-Temp Phase:
Ramp to 250–400°C (stainless steel) or 150°C (aluminum).
Monitor RGA for H2O (18 amu), CO (28 amu), H2(2 amu) peaks.
4.Controlled Cooldown:
Cool at ≤2°C/min while pumping continuously.
Verify base pressure (<10-10 mbar) at room temperature.
Material-Specific Guidelines
| Material | Max Bake Temp | Degassing Notes |
| Stainless Steel 316L | 400°C | Standard for UHV chambers; avoid >450°C to prevent carbide precipitation |
| Aluminum Alloys | 150–200°C | Limited by strength loss above 200°C |
| Copper Gaskets | 250°C | Annealing improves seal but reduces hardness |
| NEG Pumps | 600°C | Activates Zr-V-Fe getters for H2/CO adsorption |
Failure Risks & Mitigations
| Risk | Consequence | Mitigation |
| Overheating | Material warping/outgassing | Multi-zone PID control with thermocouples |
| Rapid Cooling | Thermal shock cracks | Programmable cooldown ramps |
| Insufficient Baking | Persistent H2O peaks in RGA | Extend bake time until H2O <10-11 mbar |
| Viton Gasket Use | Degradation (>200°C) | Replace with metal seals (CF/KF flanges) |
Advanced Features
In-Situ RGA: Real-time mass spectrometry (1–100 amu, 1–200 amu or 1–300 amu) to track desorbing species.
Automated Recipes: PLC-controlled ramps with pressure interlocks (e.g., halt heating if vacuum >10-6 mbar).
NEG Integration: Bakeable non-evaporable getter pumps for active gas adsorption.
Cryo-Shrouds: LN2-cooled surfaces trap desorbed gases during cooldown.
Industry Standards
ISO 3529:2020: Vacuum terminology and pressure ranges.
ASTM E595: Total mass loss (TML) and collected volatile condensable materials (CVCM) testing.
SEMI F57: Protocol for wafer processing tool vacuum hygiene.
Conclusion:
UHV baking and degassing chambers are non-negotiable for achieving extreme vacuum purity in high-tech applications—from quantum devices to fusion reactors. Proper operation prevents contamination-induced failures, with temperature control and real-time gas analysis being critical. Modern systems integrate AI-driven optimization to reduce bake times while ensuring compliance with ISO/ASTM standards.
Leading Suppliers: Guangdong GRANDE Automatic Test Equipment Limited
Hippo series bake chambers
Custom UHV degassing systems
Modular bake ovens
Benchtop degassing stations
Cylindrical Technical Parameters:
| Ultra High Vacuum Degassing Chamber | ||||||
| Horizontal/Vertical Chamber | Horizontal | Vertical | ||||
| Model No | UHV-500 | UHV-1200 | UHV-3600 | UHV-10000 | UHV-100CBM or more | UHV-300CBM or more |
| Working Diameter(mm) | 500 | 1200 | 1500 | 2000 | 2500~17000 | 3000~17000 |
| Working Length(mm) | 1000 | 1500 | 2000 | 3000 | 5000~32000 | 6000~32000 |
| No-load Vacuum Limit | 3kPa,1kPa,10Pa，133Pa，0.000001Pa，-0.1MPa，0.001mmHg，0.05Torr，1*10-5Pa，1*10-6Pa，1*10-7Pa,1*10-9Torr,1*10-9mbar | |||||
| Vacuum Limit(Option) | 3kPa,1kPa,10Pa，133Pa，0.000001Pa，-0.1MPa，0.001mmHg，0.05Torr，1*10-5Pa，1*10-6Pa，1*10-7Pa,1*10-9Torr,1*10-9mbar | |||||
| Temperature Range /℃ | -269℃, -190℃, -160℃, -150℃, -120℃, -100℃, -80℃, -70℃, -60℃, -40℃，-20℃, 0℃~+150℃, 200℃, 250℃, 300℃, 400℃, 500℃, 600℃, 700℃, 800℃, 900℃, 1000℃, 1200℃, 1400℃,1600℃, 1800℃, 2000℃, 2500℃, 3000℃, Customization is available | |||||
| Temperature Range(Option) | -269℃, -190℃, -160℃, -150℃, -120℃, -100℃, -80℃, -70℃, -60℃, -40℃，-20℃, 0℃~+150℃, 200℃, 250℃, 300℃, 400℃, 500℃, 600℃, 700℃, 800℃, 900℃, 1000℃, 1200℃, 1400℃,1600℃, 1800℃, 2000℃, 2500℃, 3000℃, Customization is available | |||||
| Refrigerating Method | Liquid refrigerant,Refrigerating machine,Nitrogen gas temperature,Bath oil temperature, Imported compressor,Tecumseh compressor(or Bitzer Compressor),finned type evaporator,air(Water)-cooling condenser | |||||
| Heating Method | SUS#304/SUS316L Stainless Steel High-speed Heater, Infrared heating array, Infrared heating cage, IR Heater | |||||
| Irradiance | UV/VUV radiation (120–400nm), AO flux (1015–1016 atoms/cm²/s), and charged particle bombardment to simulate 10+ years of LEO/GEO degradation in weeks | |||||
| Irradiation way | solar simulator,Ultraviolet irradiation simulator,Lighting environment simulation system | |||||
| power conditions | AC 3Ψ 220V;3Ψ380V; 3Ψ480V＋N＋G, 60/50Hz | |||||
| Customized Service | Welcome to custom size, Non-standard, Special requirements, OEM/ODM orders. | |||||
| The technical information will be subjected to change without notice | ||||||
Box Type Technical Parameters:
| Model No | TUHV-500 | TUHV-600 | TUHV-800 | TUHV-100 | TUHV-2000 | TUHV-8000 | |
| Volume(L) | 125 | 216 | 512 | 1000 | 2000 | 8000 | |
| Inner chamber size(mm)W*H*D | 500*500*500 | 600*600*600 | 800*800*800 | 1000*1000*1000 | 1200*1200*1200 | 2000*2000*2000 | |
| Temperature range | -269℃, -190℃, -160℃, -150℃, -120℃, -100℃, -80℃, -70℃, -60℃, -40℃，-20℃, 0℃~+150℃, 200℃, 250℃, 300℃, 400℃, 500℃, 600℃, 700℃, 800℃, 900℃, 1000℃, 1200℃, 1400℃,1600℃, 1800℃, 2000℃, 2500℃, 3000℃, Customization is available | ||||||
| Vacuum Limit | Vacuum Limit: 200kPa/101kPa～3kPa, 1kPa, 10Pa，133Pa，0.000001Pa，-0.1MPa，0.001mmHg，0.05Torr，1*10-5Pa，1*10-6Pa，1*10-7Pa, 1*10-9Torr, 1*10-9mbar | ||||||
| Final Vacuum | 1,No loading,≧1*10-5Pa2,Loading,≧1*10-4Pa. | ||||||
| Performance | Temp fluctuation | ±0.5℃ | |||||
| Temperature Uniformity | Atmospheric pressure:±2℃.3Kpa Vacuum state:±50℃.(Options:±5℃,±10℃,±15℃,±30℃) | ||||||
| Temperature resolution | 0.1℃/1℃ | ||||||
| Heating up time | 100℃/30min | ||||||
| Material | Exterior chamber material | Stainless steel plate+ Power Coated | |||||
| Inner chamber material | Stainless steel 12X18H10T, AISI 304, AISI 316, AISI 321 or equivalentSUS#304 Stainless Steel Heater, Molybdenum / Isostatic Graphite, Infrared heating array, Infrared heating cage. 700℃ and above The Interior Chamber is 310S Stainless Steel for Vacuum Chamber, Molybdenum Heater, Molybdenum Insulation Chamber. | ||||||
| Insulation Material | PU& Fiberglass wool | ||||||
| Feedthroughs & Flanges(Options) | Custom-made feedthoughs and Options are acceptable.Drawing and Pictures for reference only. | ||||||
| System | Circulation System | 1.UHV Magnetic Motor & Fans(Options)2.Multi-wing centrifugal circulating fan,strengthen axis and hot cold resistance rotary vane make of aluminum alloy,in order to forced convection.4.FLOW THROW Air Supply Method,level diffuse vertical heat exchange arc circulation.4.Program automatic control high speed air cylinder drive high low temperature air supply valve conversion. | |||||
| Heating system | SUS#304 stainless steel high-speed heater | ||||||
| Nitrogen system | Equipped with Nitrogen flow meter and differential pressure gauge. | ||||||
| RGA(Option) | 1–100 amu, 1–200 amu or 1–300 amu | ||||||
| Vacuum System | GRANDE Engineering Team always configure with the Vacuum Pump as test chamber requirements of Low Pressure as below:1,Oil Sealed Vacuum Pump & Dual Stage Rotary Vane Vacuum Pump2,Roots Vacuum Pump3,Dry Vacuum Pump4,High Vacuum Pump5,Vacuum Systems-Tailored complete solutions – efficient, green and sustainable6,TURBOLAB High Vacuum Pump Systems7,Molecular Vacuum Pump8,Diffusion Pump8,Liquid Ring Vacuum Pump | ||||||
| Controller | 7Inch or 15 Inch TH5600 PID PLC Controller Popular PID PLC controller with touch-screen operation Stores 120 different profiles with up to 1200 steps each (ramp, soak, jump, auto-start, end)Step types include: ramp, soak, jump, auto-start, and end Ethernet interface for remote monitoring and operation RECOMMENDED OPTIONS Dry air purge, to compensate for quickly shrinking air during cooling, as well as to reduce risk of condensation.Product temperature control, allows feedback from a second sensor on the product. Ensures faster completion of transition steps.Options:Siemens or Mitsubishi PLC | ||||||
| Other Components | Cable port(50mm), control status indicator lights, loading shelves(2pcs for free) | ||||||
| Safety protection device | Over-heat protection circuit breaker,Control system overload protection,Overload indicator lamp. | ||||||
| Power Supply | AC 1Ψ 110V;AC 1Ψ 220V;3Ψ380V 60/50Hz | ||||||
| Vacuum Valves | High-end vacuum valves, The GRANDETOP Global Service team is highly experienced and utilizes well-established, proven processes. Your goals are our #1 priority. GRANDETOP Global Service assures continuous performance improvement, minimized down times and ensures your vacuum equipment is running at its best performance and optimal efficiencies.Actuators manual with turning handle pneumatic: single acting with closing spring (NC) or opening spring (NO), or double acting | ||||||
| Air Supply | 0.6~0.8MPa(With Self-locking fast connector) | ||||||
| Customized service | Welcome to Non-standard and Special requirements,OEM/ODM orders.Customization of inner chamber size, temperature & humidity range,ect. | ||||||
| The technical information will be subjected to change without notice | |||||||
