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UHV Baking & Degassing Chamber
  • UHV Baking & Degassing Chamber
  • UHV Baking & Degassing Chamber
UHV Baking & Degassing ChamberUHV Baking & Degassing Chamber

UHV Baking & Degassing Chamber

UHV Baking & Degassing Chambers are critical for achieving ultra-high vacuum (UHV) conditions by removing adsorbed gases, water vapor, and contaminants from chamber walls and components. Below is a technical breakdown of their applications, parameters, usage, and operational principles

Product Details

Core Description

Purpose: Eliminate surface-bound contaminants (H2O, CO, H2, hydrocarbons) via controlled heating under vacuum, enabling base pressures <10-10 mbar.

Mechanism:

Baking: Heats entire chamber to 150–400°C to desorb gases trapped in materials.

Degassing: Targets specific components (e.g., ion pumps, NEG panels) with localized heating.

Key Components:

Heating System: Resistive heaters (flexible blankets/embedded coils) with ±1°C uniformity.

Thermal Insulation: Multi-layer reflectors (MLI) minimizing heat loss.

Vacuum Monitoring: Bayard-Alpert gauges and RGAs tracking partial pressures.


Key Applications

IndustryUse CaseImpact
Particle PhysicsPre-conditioning LHC beam pipes (<10-13 mbar)Prevents beam scattering from residual gas
SemiconductorDegassing EUV lithography chambers (prevents carbon haze on optics)Enables <2 nm chip fabrication
Quantum ComputingPreparing qubit fabrication chambers (reduces decoherence)Extends coherence time >100 μs
AerospaceOutgassing satellite components per ASTM E595Avoids sensor contamination in orbit
Fusion ResearchConditioning ITER vacuum vessel wallsMaintains plasma purity

Critical Parameters

ParameterTypical RangeSignificance
Temperature150–400°C (baking); 600°C (NEG degas)Higher temps remove deeply trapped H2O (≥200°C required)
Vacuum Level<10-7 mbar during bakingEnsures efficient gas desorption
Ramp Rate1–5°C/minPrevents thermal stress in welds/ceramics
Bake Duration24–168 hoursTime-dependent outgassing decay (e.g., H2O peaks at 8h)
Cooling Rate<2°C/min (post-bake)Avoids re-adsorption of gases
Leak Rate<10-9 mbar·L/sValidates integrity post-bake

Operational Workflow

1.Pre-Bake Preparation:

Clean surfaces with solvents (acetone/IPA) and install thermocouples/RGA probes.

2.Pump-Down & Initial Heating:

Rough pump to 10-3 mbar, then engage turbopumps.Heat at 1–5°C/min to 150°C (hold for outgassing).

3.High-Temp Phase:

Ramp to 250–400°C (stainless steel) or 150°C (aluminum).

Monitor RGA for H2O (18 amu), CO (28 amu), H2(2 amu) peaks.

4.Controlled Cooldown:

Cool at ≤2°C/min while pumping continuously.

Verify base pressure (<10-10 mbar) at room temperature.


Material-Specific Guidelines

MaterialMax Bake TempDegassing Notes
Stainless Steel 316L400°CStandard for UHV chambers; avoid >450°C to prevent carbide precipitation
Aluminum Alloys150–200°CLimited by strength loss above 200°C
Copper Gaskets250°CAnnealing improves seal but reduces hardness
NEG Pumps600°CActivates Zr-V-Fe getters for H2/CO adsorption

Failure Risks & Mitigations

RiskConsequenceMitigation
OverheatingMaterial warping/outgassingMulti-zone PID control with thermocouples
Rapid CoolingThermal shock cracksProgrammable cooldown ramps
Insufficient BakingPersistent H2O peaks in RGAExtend bake time until H2O <10-11 mbar
Viton Gasket UseDegradation (>200°C)Replace with metal seals (CF/KF flanges)

Advanced Features

In-Situ RGA: Real-time mass spectrometry (1–100 amu, 1–200 amu or 1–300 amu) to track desorbing species.

Automated Recipes: PLC-controlled ramps with pressure interlocks (e.g., halt heating if vacuum >10-6 mbar).

NEG Integration: Bakeable non-evaporable getter pumps for active gas adsorption.

Cryo-Shrouds: LN2-cooled surfaces trap desorbed gases during cooldown. 


Industry Standards

ISO 3529:2020: Vacuum terminology and pressure ranges.

ASTM E595: Total mass loss (TML) and collected volatile condensable materials (CVCM) testing.

SEMI F57: Protocol for wafer processing tool vacuum hygiene.


Conclusion:

UHV baking and degassing chambers are non-negotiable for achieving extreme vacuum purity in high-tech applications—from quantum devices to fusion reactors. Proper operation prevents contamination-induced failures, with temperature control and real-time gas analysis being critical. Modern systems integrate AI-driven optimization to reduce bake times while ensuring compliance with ISO/ASTM standards. 

Leading Suppliers: Guangdong GRANDE Automatic Test Equipment Limited

Hippo series bake chambers

Custom UHV degassing systems

Modular bake ovens

Benchtop degassing stations


Cylindrical Technical Parameters:

Ultra High Vacuum Degassing Chamber
Horizontal/Vertical ChamberHorizontalVertical
Model NoUHV-500UHV-1200UHV-3600UHV-10000UHV-100CBM or moreUHV-300CBM or more
Working Diameter(mm)5001200150020002500~170003000~17000
Working Length(mm)10001500200030005000~320006000~32000
No-load Vacuum Limit3kPa,1kPa,10Pa,133Pa,0.000001Pa,-0.1MPa,0.001mmHg,0.05Torr,1*10-5Pa,1*10-6Pa,1*10-7Pa,1*10-9Torr,1*10-9mbar
Vacuum Limit(Option)3kPa,1kPa,10Pa,133Pa,0.000001Pa,-0.1MPa,0.001mmHg,0.05Torr,1*10-5Pa,1*10-6Pa,1*10-7Pa,1*10-9Torr,1*10-9mbar
Temperature Range /℃-269℃, -190℃, -160℃, -150℃, -120℃, -100℃, -80℃, -70℃, -60℃, -40℃,-20℃, 0℃~+150℃, 200℃, 250℃, 300℃, 400℃, 500℃, 600℃, 700℃, 800℃, 900℃, 1000℃, 1200℃, 1400℃,1600℃, 1800℃, 2000℃, 2500℃, 3000℃, Customization is available
Temperature Range(Option)-269℃, -190℃, -160℃, -150℃, -120℃, -100℃, -80℃, -70℃, -60℃, -40℃,-20℃, 0℃~+150℃, 200℃, 250℃, 300℃, 400℃, 500℃, 600℃, 700℃, 800℃, 900℃, 1000℃, 1200℃, 1400℃,1600℃, 1800℃, 2000℃, 2500℃, 3000℃, Customization is available
Refrigerating MethodLiquid refrigerant,Refrigerating machine,Nitrogen gas temperature,Bath oil temperature, Imported compressor,Tecumseh compressor(or Bitzer Compressor),finned type evaporator,air(Water)-cooling condenser
Heating MethodSUS#304/SUS316L Stainless Steel High-speed Heater, Infrared heating array, Infrared heating cage, IR Heater
IrradianceUV/VUV radiation (120–400nm), AO flux (1015–1016 atoms/cm²/s), and charged particle bombardment to simulate 10+ years of LEO/GEO degradation in weeks
Irradiation waysolar simulator,Ultraviolet irradiation simulator,Lighting environment simulation system
power conditionsAC 3Ψ 220V;3Ψ380V; 3Ψ480V+N+G, 60/50Hz
Customized ServiceWelcome to custom size, Non-standard, Special requirements, OEM/ODM orders.
The technical information will be subjected to change without notice

Box Type Technical Parameters:

Model NoTUHV-500TUHV-600TUHV-800TUHV-100TUHV-2000TUHV-8000
Volume(L)125216512100020008000
Inner chamber size(mm)W*H*D 500*500*500600*600*600800*800*8001000*1000*10001200*1200*12002000*2000*2000
Temperature range-269℃, -190℃, -160℃, -150℃, -120℃, -100℃, -80℃, -70℃, -60℃, -40℃,-20℃, 0℃~+150℃, 200℃, 250℃, 300℃, 400℃, 500℃, 600℃, 700℃, 800℃, 900℃, 1000℃, 1200℃, 1400℃,1600℃, 1800℃, 2000℃, 2500℃, 3000℃, Customization is available
Vacuum LimitVacuum Limit: 200kPa/101kPa~3kPa, 1kPa, 10Pa,133Pa,0.000001Pa,-0.1MPa,0.001mmHg,0.05Torr,1*10-5Pa,1*10-6Pa,1*10-7Pa, 1*10-9Torr, 1*10-9mbar
Final Vacuum1,No loading,≧1*10-5Pa2,Loading,≧1*10-4Pa.
PerformanceTemp fluctuation±0.5℃
Temperature UniformityAtmospheric pressure:±2℃.3Kpa Vacuum state:±50℃.(Options:±5℃,±10℃,±15℃,±30℃)
Temperature resolution0.1℃/1℃
Heating up time100℃/30min
MaterialExterior chamber material Stainless steel plate+ Power Coated
Inner chamber materialStainless steel 12X18H10T, AISI 304, AISI 316, AISI 321 or equivalentSUS#304 Stainless Steel Heater, Molybdenum / Isostatic Graphite, Infrared heating array, Infrared heating cage. 700℃ and above The Interior Chamber is 310S Stainless Steel for Vacuum Chamber, Molybdenum Heater, Molybdenum Insulation Chamber.
Insulation MaterialPU& Fiberglass wool
Feedthroughs & Flanges(Options)Custom-made feedthoughs and Options are acceptable.Drawing and Pictures for reference only. 
SystemCirculation System1.UHV Magnetic Motor & Fans(Options)2.Multi-wing centrifugal circulating fan,strengthen axis and hot cold resistance  rotary vane  make of aluminum alloy,in order to forced convection.4.FLOW THROW Air Supply Method,level diffuse vertical heat exchange arc circulation.4.Program automatic control high speed air cylinder drive high low temperature air supply valve conversion.
Heating systemSUS#304 stainless steel high-speed heater
Nitrogen systemEquipped with Nitrogen flow meter and differential pressure gauge.
RGA(Option)1–100 amu, 1–200 amu or 1–300 amu
Vacuum SystemGRANDE Engineering Team always configure with the Vacuum Pump as test chamber requirements of Low Pressure as below:1,Oil Sealed Vacuum Pump & Dual Stage Rotary Vane Vacuum Pump2,Roots Vacuum Pump3,Dry Vacuum Pump4,High Vacuum Pump5,Vacuum Systems-Tailored complete solutions – efficient, green and sustainable6,TURBOLAB High Vacuum Pump Systems7,Molecular Vacuum Pump8,Diffusion Pump8,Liquid Ring Vacuum Pump
Controller7Inch or 15 Inch TH5600 PID PLC Controller Popular PID PLC controller with touch-screen operation Stores 120 different profiles with up to 1200 steps each (ramp, soak, jump, auto-start, end)Step types include: ramp, soak, jump, auto-start, and end Ethernet interface for remote monitoring and operation RECOMMENDED OPTIONS Dry air purge, to compensate for quickly shrinking air during cooling, as well as to reduce risk of condensation.Product temperature control, allows feedback from a second sensor on the product. Ensures faster completion of transition steps.Options:Siemens or Mitsubishi PLC
Other ComponentsCable port(50mm), control status indicator lights, loading shelves(2pcs for free)
Safety protection deviceOver-heat protection circuit breaker,Control system overload protection,Overload indicator lamp.
Power SupplyAC 1Ψ 110V;AC 1Ψ 220V;3Ψ380V 60/50Hz 
Vacuum ValvesHigh-end vacuum valves, The GRANDETOP Global Service team is highly experienced and utilizes well-established, proven processes. Your goals are our #1 priority. GRANDETOP Global Service assures continuous performance improvement, minimized down times and ensures your vacuum equipment is running at its best performance and optimal efficiencies.Actuators manual with turning handle pneumatic: single acting with closing spring (NC) or opening spring (NO), or double acting
Air Supply0.6~0.8MPa(With Self-locking fast connector)
Customized serviceWelcome to Non-standard and Special requirements,OEM/ODM orders.Customization of inner chamber size, temperature & humidity range,ect.
The technical information will be subjected to change without notice