Tel.: 8615989623158
E-mail: sales@grandetop.com
Tel.: 8615989623158
E-mail: sales@grandetop.com
It is used to transfer samples between vacuum preparation equipment, vacuum testing equipment, vacuum analysis equipment and other studios in high vacuum or ultra-high vacuum environments. It can be widely used in the scientific research, small batch preparation, analysis and testing of thin film materials in colleges and universities and scientific research institutes.
Composition
It is mainly composed of injection chamber, transition chamber, transfer chamber, trolley turning chamber, sample heating and degassing, sample plasma cleaning, transfer trolley, magnetic transmission mechanism, exhaust system, vacuum measurement, electronic control system, computer control system and installation machine.
Technical parameters:
| Model | UHV-150 | |
| Technical indicators | ||
| Vacuum Chamber | Sample injection room | Square structure, size 360x220x360mm |
| Transition Room | Cylindrical horizontal structure, size Ф150x700mm | |
| Transfer Room | Cylindrical horizontal structure, size Ф150x3000mm | |
| Trolley steering room | Cylindrical vertical structure, size Ф550x600mm | |
| Vacuum system configuration | Ion pump, compound molecular pump, mechanical pump, pneumatic gate valve, vacuum gauge | |
| Ultimate pressure | Sample injection room | ≤5.0x10 -6 Pa (after baking and degassing) |
| Transition Room | ≤2.0x10 -8 Pa (after baking and degassing) | |
| Transfer Room | ≤2.0x10 -8 Pa (after baking and degassing) | |
| Restore vacuum time | Sample injection room | 6.7x10 -5 Pa can be reached in 30 minutes (after short exposure to the atmosphere and filling with dry nitrogen, the air is pumped out) |
| Transition Room | -7 Pa 10 minutes after connection with injection chamber-8 Pa 5 minutes after handover to the transfer chamber | |
| Sample transfer cart | One, can load 3 2-inch samples | |
| Sample pretreatment | The sample was heated and baked at 300℃ and then cleaned by high pressure plasma. | |
| Sample library in injection room | Can put 3 samples at a time | |
| Transport trolley | Computer controlled, adjustable speed, equipped with trolley tracking system, sample tracking system | |
| Trolley steering room | Two cars can be placed at a time, and the cars can be transferred to any branch line. | |
| Computer control system | Adopt PLC+industrial computer+touch screen full automatic control mode | |
| Sample handover to the studio | Electric magnetic force transmission mechanism is realized | |
