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Core UHV XHV Equipment in National Projects
  • Core UHV XHV Equipment in National Projects
Core UHV XHV Equipment in National Projects

Core UHV XHV Equipment in National Projects

Ultimate vacuum: 5.0×10-8 Pa Electron storage ring energy: 3.5 GeVPhoton energy: 0.1~40 keV

Product Details

The front end area is the first component connected to the storage ring. The storage ring provides static vacuum isolation and dynamic vacuum protection to avoid catastrophic accidents caused by vacuum leakage of the beam line; shields harmful high-energy radiation to protect the storage ring hall and experimental station staff from personal injury; absorbs excess radiation power to prevent various components from being destroyed by excessive heat load; and regulates the window of the radiation light source to provide a beam with horizontal and vertical angles that match the beam line.

The front end area is mainly composed of movable light screen, fixed aperture, pneumatic valve, quick response valve, water-cooled light gate, safety light gate, etc.

Beamline


The beam line and front end are mainly used between the accelerator storage ring and the experimental station. The radiation light drawn from the storage ring is split, cooled, monochromated, focused, and collimated to meet the energy range, photon energy, resolution, beam spot size, and micro-area energy scanning required by the experiment.The beam line is mainly composed of a monochromator, a focusing mirror box, a beam position detector, a precision adjustable slit, a water-cooled light gate, a differential pumping system and a beryllium window.

Core scientific research equipment

Ultra-high/very high vacuum calibration device

Technical parameters: The ultimate vacuum reaches 10 -10 Pa. It adopts a combination of a magnetically suspended turbomolecular pump and a non-evaporable getter pump, making breakthroughs in the leak detection of extremely small leaks and the flow conductivity measurement technology of irregular small holes.

Application areas: spacecraft ring models, particle accelerators (such as electron-positron colliders), nanotechnology, to ensure the accuracy of vacuum values and equipment reliability.

Innovative achievements: Filling domestic gaps, winning the first prize of the National Science and Technology Progress Award in 20018 , and supporting the safe flight of satellites and the development of the nuclear industry.

Fusion reactor vacuum chamber system

Structural design: D-shaped double-layer shell, 50mm thick ultra-low carbon stainless steel, total height 20 meters, weight 295 tons; in the future, 8 modules will be combined into a full-circular vacuum chamber to accommodate plasma of hundreds of millions of degrees.

Functional breakthrough: Provides a nuclear safety barrier for fusion reactors, ensures the operation of superconducting magnets and plasma, and achieves internationally advanced precision and welding technology.

Derivative applications: The technology has been expanded to particle accelerators and semiconductor manufacturing, resulting in more than 40 patents.

Comprehensive extreme conditions experimental device

Integration of multiple extreme environments: compatible with UHV environments under extremely low temperature (1mK), ultra-high pressure (300GPa), strong magnetic field (26T), and ultra-fast light field (100 attoseconds).

Scientific output: Support research on fractional quantum Hall effect, superconducting quantum computing, etc., and realize the localization of liquid helium-free dilution refrigerators.

Open sharing: Providing over 200,000 hours of machine time per year, serving scientific research institutions around the world.

Comparison of key technical parameters

Device NameUltimate vacuumCore materials/technologySpecial Features
Ultra-high/very high vacuum calibration device10 -10 PaMagnetic levitation molecular pump + NEG pumpFlow split calibration
"Kuafu" vacuum chamberFusion-grade ultra-high vacuumUltra-low carbon stainless steel (50mm thick)Resistant to billion-degree plasma radiation
Comprehensive extreme deviceUHV CompatibleMulti-system integrationFour extreme conditions synchronous control
Shanghai Institute of Optics and Fine Mechanics UHV System*<10 -7 PaUltra low magnetic 316L stainless steelFive-dimensional translation stage (±10μm accuracy)


Key technology breakthroughs and equipment parameter comparison

Device NameVacuum levelKey technical parametersApplication Areas
ADS Vacuum Valve SystemUHVLeakage rate ≤10 -10 mbar·L/s, radiation resistance 10 8 GyNuclear waste transmutation
Nano-X Interconnect Experiment StationUHV203 meters of pipeline, 40+ equipment interconnected, base pressure <10 -8 mbarNanomaterials/Semiconductors
EUV Lithography Vacuum SystemUHV5.8×10 -7 Torr, workpiece stage stability ±0.1 nmLithography machine development
HIAF High Frequency Vacuum ChamberXVThin wall design, anti-beam disturbanceHeavy ion acceleration
UHV/XHV Calibration DeviceXHV (10 -10 Pa)Shunt calibration, uncertainty 1.5%–3.5%Vacuum measurement standards

Innovation Directions and Challenges

Breaking through the limits of materials

The vacuum chamber of a fusion reactor needs to withstand high-temperature particle irradiation and thermal stress. The Hefei team solved the deformation problem through ultra-thick stainless steel welding technology.The Huairou device achieves liquid helium-free cooling under a 26T strong magnetic field, reducing operating costs.

Cross-domain technology integration

The split flow method in the vacuum calibration device is adopted by particle accelerators to improve beam stability.Fusion vacuum chamber remote operation technology is transplanted to the precision assembly of semiconductor equipment.

Localization process

Core components such as non-evaporable getter pumps (NEG) and magnetic levitation pumps have broken the international monopoly.Ultra-high vacuum valves and seals are independently designed, reducing costs by 40%.


Summary of Strategic Value

Energy security: Supporting the “artificial sun” fusion project and fourth-generation nuclear power (such as high-temperature gas-cooled reactors).

Quantum technology: provides a pure experimental environment for topological states and superconducting computing, giving rise to original results.

Industrial upgrading: Semiconductor coating and aerospace device testing rely on high-precision vacuum, which directly improves the level of the industrial chain.Currently, GRANDE's ultra-high vacuum technology has entered the first echelon internationally. In the future, it will focus on the commercialization of fusion energy and the manufacturing of quantum devices, and promote the penetration of large scientific facilities into the industrial end.