Tel.: 8615989623158
E-mail: sales@grandetop.com
Tel.: 8615989623158
E-mail: sales@grandetop.com
The system is mainly used for high temperature CVD experiments on workpieces and is also suitable for the preparation process of rolled graphene.
The system is mainly composed of vacuum quartz tube components, two-way sample inlet and outlet vacuum chamber components, sample heating components, automatic push-pull table components, gas path components, heating and temperature control components, mounting stand, water cooling system, etc.
Technical parameters:
| System capacity | Annual output: 200,000 square meters |
| Vacuum Chamber | It is composed of quartz tube and stainless steel vacuum, with three chambers and two-way feeding structure . The quartz tube is straight and horizontally installed, equipped with water cooling device . The size of quartz tube is Φ455x2900mm |
| Vacuum system configuration | Compound dry vacuum pump (JGM-1000A), digital vacuum gauge, imported valves, wide range automatic pressure control function, etc. |
| Vacuum system configuration | Molecular pump, mechanical pump, wide range digital vacuum gauge, valve, etc. |
| Sample temperature measurement components | Using thermocouple method |
| Heating power supply | Induction heating can control temperature , rated output power 60KW, stable operation 30KW , external heating method , substrate heating temperature room temperature ~ 1000℃ heating rate 40 ~ 50℃/min |
| Sample inlet and outlet system | Chamber size 3720x690x690mm, automatic loading and unloading, fast cooling |
| Working gas path | Inlet gas lines, four lines in total: two lines for alkanes, one line for hydrogen, one line for nitrogen, stainless steel pipes |
| Automatic control system | Industrial computer (touch screen) + PLC main control unit, double insurance design to ensure the stability and reliability of the process |
| Workbench size (door opening) | 400x1000mm |
